Compact lasers that operate in the xtreme ultraviolet (EUV) wave- lengths – 5 to 50 nm – are poised
to offer new abilities to image, pattern and
thanks to short wave-
lengths and energetic
(Top) In a capillary-discharge extreme ultraviolet
(EUV) laser, the magnetic field from a fast current
pulse (indicated by I in the first stage to the left) rap-
idly compresses the plasma toward the axis, creating
hot and dense columns with aspect ratio length/di-
ameter >1000. Lasing occurs close to the maximum
compression. (Bottom) An EUV laser (background
left) mounted on a microscopy
test bed (right). Courtesy of Fernando
Tomasel, XUV Lasers Inc.
Advances in compact EUV lasers could benefit industries
from semiconductor manufacturing to medicine.