tal funded project7. There, a new type of
energy controller is also developed, which
operates passively and further smoothens
the pulse energy.
With the present system, ultrafast, on-the-fly micromachining of scattering centers for illumination applications have been
demonstrated. More than 1.6 million dots
per second were written in a polymethyl
methacrylate plate with a reproducibility
of 1 µm8. Further applications, especially
with tight trajectories, where the advantages of the new type of laser system are
obvious, are under development.
1. GFH GmbH (April 2013). UKP-Laser mit
hoher Bahngeschwindigkeit, Mikroproduktion.
2. GFH GmbH (January 2016). Der Laserstrahl
als Drehwerkzeug, Mikroproduktion.
3. BMBF, Erforschung und Entwicklung von
innovativen hybrid-integrierten Diodenla-ser-Komponenten und Systemen (
4. A. Klehr et al. (2011). Compact ps-pulse
laser source with free adjustable repetition
rate and nJ pulse energy on microbench.
Proc SPIE, Vol. 7953, No. 79531D.
5. F. Harth et al. (2016). Ultra high-speed mi-
cromachining of transparent materials using
high PRF ultrafast lasers and new resonant
scanning systems. Proc SPIE, Vol. 9736,
6. F. Harth et al. (2016). Ultrafast laser with
an average power of 120 W at 515 nm and
a highly dynamic repetition rate in the
MHz range for novel applications in mi-
cromachining. Proc SPIE, Vol. 9726, No.
7. Hochleistungs-UKP-Laser zur Mikromate-
rialbearbeitung mit variabler Pulsfolgefre-
quenz (HiPoRep), BMWi, VP2837408AB4.
8. F. Harth et al. (2016). Ultra high-speed
micromachining of transparent materials
using high PRF ultrafast lasers and new
resonant scanning systems.
Meet the authors
Florian Harth received his degree in experi-
mental physics at the Technical University of
Kaiserslautern in Germany. Since 2009, he
has worked in the field of ultrafast laser source
development and micromachining at the
Photonik-Zentrum Kaiserslautern eV (PZKL);
Thomas Herrmann studied physics at the
University of Kaiserslautern and received his
Ph.D. degree in 1999. He was co-founder of the
ultrafast laser company Lumera Laser GmbH
(now Coherent Kaiserslautern) and was head
of Lumera’s application lab from 2003 to 2009.
In 2009, he joined the PZKL and is responsible
for the micromachining application center;
Bernhard Henrich studied physics and
received his Ph.D. at the University of Kaiserslautern in 2000. He is co-founder of the
Lumera Laser GmbH, and developed the first
RAPID laser. In 2013, he joined the PZKL
as technology manager; email: bernhard.
Johannes L‘huillier studied physics at the
University of Kaiserslautern where he received
his Ph.D. in 2003. His research is focused on
optical parametric processes, ultrashort laser
pulse as well as on laser micromachining.
Since 2009 he has served as the CEO of the
PZKL; email: firstname.lastname@example.org.
Ultrashort Pulse Lasers Tech Feature